3D AFVI
3D inspection system
- Loading type : cassette type, magazine type
- Inspection target: Flat bump, Coined bump
- Inspection items : diameter, height, damaged, dimple, FM, bridge, missing, pitch, warp, coplanarity, void
- Tact time : 36 sec per strip(216unit)
- CCD Resolution :
- 3D width resolution(x):6.8㎛
- 3D height resolution(z):0.16㎛
- 2D resolution(x,y):8㎛
